Products

Flextura PVD – Flexible Cluster tool for the semiconductor industry With the Flextura Cluster 200, Polyteknik AS is introducing a multifunctional deposition tool offering unseen flexibility combined with high troughput capacity.The system is born with standard SEMI wafer handling, high quality subcomponents and can be equipped with standard sputtering modules as well as newly developed modules introducing new development opportunities. The perfect tool for development or flexible production – directly up-scalable! High temperature deposition chamber Substrate temperatures up to 1000…